Advanced Nano-devices Produced by High-performance Plasma Etching Processes

Surface Reaction Mechanisms in Plasma Etching Processes By

performance of biological system and advanced oxidation processes (aop) treating antibiotic production industrial wastewater

در این مطالعه، عملکرد دو سیستم اکسیداسیون شیمیایی پیشرفته و یک سیستم بیولوژیکی برای حذف آموکسی سیلین در فاضلاب های سنتزیدر غلظت های مشابه با موارد صنعتی مورد بررسی قرار گرفته شدند. مطالعه انجام شده دارای سه بخش متفاوت اکسیداسیون با ازن و اشعه uv، اکسیداسیون با استفاده از نانو فتوکاتالیست tio2 و استفاده از بیوراکتور هوازی لجن فعال با جداکننده های فیزیکی می باشد. در هر بخش، متغیر های متفاوتی متنا...

Multivariate Endpoint Detection of Plasma Etching Processes

In plasma etching processes it is critical to know when the film being etched has cleared to the underlying film, i.e. to detect endpoint, in order to achieve the desired device performance in the resulting integrated circuit. The most highly utilized sensor technology for determining endpoint has historically been optical emission spectroscopy (OES), because it is both non-invasive and highly ...

Advanced inductively coupled plasma etching processes for fabrication of resonator-quantum well infrared photodetector

Resonator-quantum well infrared photodetectors (R-QWIPs) are the next generation of QWIP detectors that use resonances to increase the quantum efficiency (QE). To achieve the expected performance, the detector geometry must be produced in precise specification. In particular, the height of the diffractive elements (DE) and the thickness of the active resonator must be uniformly and accurately r...

Quality assessment of digested sludges produced by advanced stabilization processes.

The European Union (EU) Project Routes aimed to discover new routes in sludge stabilization treatments leading to high-quality digested sludge, suitable for land application. In order to investigate the impact of different enhanced sludge stabilization processes such as (a) thermophilic digestion integrated with thermal hydrolysis pretreatment (TT), (b) sonication before mesophilic/thermophilic...